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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • ace passivation film of an insulating film such as SiON on said first surface passivation film and the surface of said first-stage recess groove; removing said first and second surface passivation films on an area where an ohmic electrode is to be formed and forming said ohmic electrode on the area by vapor deposition; and forming a second-stage recess groove on said firs recess groove by photolit
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