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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • Substrate 2 may be formed from a semiconductor material, such as single crystal silicon, single crystal gallium arsenide, polysilicon, indium phosphide, a layered bulk semiconductor substrate(such as a silicon on insulator (SOI) substrate as exemplified by a silicon on glass (SOG) orsilicon on sapphire (SOS) substrate), or any other suitable material.
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