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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • Currently, materials such as W, Ti, Ta, Co, their nitrides and silicides, Zr, Hf, SiGe, can be deposited in this deep trench structures via atomic layer deposition (ALD) and chemical vapor deposition (CVD).
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