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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • The gases described in the reference above such as Ar, O2, CF4 and H2, as well as C2F6, CHF3, CH2F2, CF3Br, N2, NF3, Cl2, CCl4, HBr and SF6 may be used as the etching gas.
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