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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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  • An optical profiler system in accordance with claim 23 wherein said range is given by the expression |p+z-z0 |???L/2 where L is said equivalent coherence length, is the local surface height, z is the scan position, and zo is a constant, whereby p varies with the position on said object surface and comprises a measure of the object surface topography.
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