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An Entity of Type : prov:Entity, within Data Space : webisa.webdatacommons.org associated with source dataset(s)

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prov:value
  • (14) A wafer holder to hold a wafer on the upper surface characterized in that: said wafer holder comprises a wafer support plate and n or more pieces of wafer support members placed on the wafer support plate; and at least n???2 pieces of said wafer support members are the wafer support members according to any one of the items (9) to (13) wherein n is an integer not smaller than 4.
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