About: http://webisa.webdatacommons.org/103022407

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Dielectric layer 212 may be doped with phosphorus, boron, or other elements, and may be formed using a high density plasma deposition process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com