About: http://webisa.webdatacommons.org/109501029

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, the upper layer 90 is a suitable conductive material, such as tungsten, aluminum or polysilicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca