About: http://webisa.webdatacommons.org/109583578

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Material not covered by the mask is removed to a depth that is determined by a variety of factors including the length of time over which the plasma is applied.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com