PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Typical plasma applications for these advanced devices includes device cleaning, photoresist descum, stripping of materials such as photoresist and polyimide, etching unique materials and removing contamination.
http://www.w3.org/ns/prov#wasQuotedFrom
  • nordson.com