| http://www.w3.org/ns/prov#value | - 100 sccm and about 1,000 sccm, such as between about 100 sccm and about 700 sccm, maintaining the chamber pressure less than about 120 Torr, such as between about 1 Torr and about 50 Torr, for example, between about 1 Torr and about 5 Torr, and maintaining the heater temperature between about 100??? C. and about 600??? C., such as between 175??? C. and about 350??? C., for example 300??? C. It is
|
