About: http://webisa.webdatacommons.org/137311760

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	On the other hand, if a polishing rate varies during from immediately after use to completion of use, polishing condition must be adjusted and there is a problem that a polishing efficiency is worse.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com