About: http://webisa.webdatacommons.org/137516348

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, there is a need to form one of the features to include a critical dimension less than achievable at a resolution limit of lithography.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com