About: http://webisa.webdatacommons.org/139530246

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	polymer, spin-on glass, oxynitride, polyimide, photoresist or removable organics or other materials that can act as a sacrificial layer and be removed by etching to provide a gap between the metal layers.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com