About: http://webisa.webdatacommons.org/144116131

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, the third dielectric layer is an oxide such as silicon oxide and is deposited as a thin layer (around 500 ???).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com