About: http://webisa.webdatacommons.org/144936241

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Herein, the prevention of the short channel effect is a problem to be solved for a high integration of a semiconductor device.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com