About: http://webisa.webdatacommons.org/14525489

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 12, wherein the damascene recess contains a gate oxide, and the oxide is an oxygen-rich oxide formed on the gate oxide to a thickness of between about 10 ??? to about 50 ??? by chemical vapor deposition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com