About: http://webisa.webdatacommons.org/147405154

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The accelerating voltage was 50 to 80 kV, for example 65 kV. The dose was 1???1015 to 8???1015 cm-2, for example 5???10.sup. 15 cm-2, which was larger than the dose of the phosphorus previously implanted.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca