About: http://webisa.webdatacommons.org/15052458

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In accordance with the invention, a pyrolytic CVD film is deposited on, e.g., a silicon wafer, or other substrate, on which photolithography is to be carried out.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com