About: http://webisa.webdatacommons.org/151273452

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Furthermore, a second metal interconnection 16 is formed of mainly WSi2, TiN or Al, also shown in FIG. 2D.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com