About: http://webisa.webdatacommons.org/15612255

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Thin-film capacitor 100 includes a silicon wafer 102, which may alternatively be any common type of integrated circuit substrate material such as GaAs or other materials.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com