| http://www.w3.org/ns/prov#value | - As for the dry etching conditions on the occasion of forming the transfer lenses, since they are largely dependent on the apparatus to be employed, the conditions such as gas pressure, power, the flow rate of gas, the temperature of substrate, the distance between electrodes, the operating conditions of magnetron, etc., should be optimized in conformity with each apparatus, thus finding out optima
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