About: http://webisa.webdatacommons.org/157878620

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	20080196742Particle removal method and composition - A method and cleaning solution for cleaning electronic substrates, such as a semiconductor wafers, hard disks, photomasks or imprint molds.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org