| http://www.w3.org/ns/prov#value | - the surface of said spacer to form a valve beam which is contiguous at an end portion thereof to said nozzle plate via one of said openings and which has a valve at a yieldable portion thereof and then removing said photo-resist; and a separating step of removing a central portion of said spacer including a portion opposed to said nozzle and then exfoliating said substrate from said nozzle plate.
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