| http://www.w3.org/ns/prov#value | - the conductivity is not reduced by 50% or more in order to ensure thermal stability between the conductive film 22 and the gate insulating film 21. [0189] The interface of the conductive film 22 made of that type of material and the gate insulating film 21 consisting of a material, such as Ta oxide, Ti oxide, Zr oxide, Hf oxide, or Ce oxide, has excellent thermal stability. [0190] Next, as shown i
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