| http://www.w3.org/ns/prov#value | - It is preferable that, concerning the respective members of the optical deflection mirror unit 100, the movable plate 101, and the supporters 103 are made mainly of a silicon substrate, which is high rigid material, or the like, that the elastic members 102 are made of an organic insulating material such as polyimide, which has a long life span and can exhibit a large deflection angle, and that th
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