| http://www.w3.org/ns/prov#value | - By smoothing the interface surface the initial surface roughness of subsequently deposited layers can be reduced. [0038] In one embodiment of the present invention, the selected layer is a layer that precedes the non-magnetic spacer layer in the deposition order. [0039] In an alternative embodiment of the present invention, several layers are selected for smoothing at an atomic scale using gas clu
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