About: http://webisa.webdatacommons.org/165923499

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, there is a need to more efficiently and more uniformly supply and remove reaction and other gases to and from the surfaces of wafers being processed, and particularly those being coated by CVD processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com