About: http://webisa.webdatacommons.org/166330204

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The specific invention described herein relates to light doping of the silicon layer with a n-type dopant such as P or Sb.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com