About: http://webisa.webdatacommons.org/166351529

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	There is therefore a need for an improved MEMS device capable of rapidly and efficiently actuating a generally flat or planar moving element such as a mirror to provide, for example, a switching operation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com