About: http://webisa.webdatacommons.org/166888266

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The flow of the drying material may be controlled by a vent unit including at least one part for controlling the flow of the drying material to uniformly or substantially uniformly dry the wafer.09-11-2008
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org