About: http://webisa.webdatacommons.org/172005579

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The capping layer pattern 362 may include, for example, an oxide such as silicon oxide or a nitride such as silicon nitride, however, any suitable oxide or nitride may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com