About: http://webisa.webdatacommons.org/178593262

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The process as claimed in claim 1, wherein the Si-containing film is silicon and the substrate is a material having a high dielectric constant. 16.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com