About: http://webisa.webdatacommons.org/180696813

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention relates to a method of measuring a temperature, and more particularly to a method of indirectly measuring a substrate temperature under heat treatment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es