About: http://webisa.webdatacommons.org/180708870

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The interlayer dielectric layer 112 can be formed from silicon dioxide, boron phosphate silicate glass (???BPSG???), polyimides, benzocyclobutene, epoxy, or other materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com