About: http://webisa.webdatacommons.org/188539605

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, the energy should be high enough to enable the implanted species to penetrate through the insulating material, e.g. oxide layer, if present on top of the substrate 41.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com