About: http://webisa.webdatacommons.org/191883598

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A carrier gas may be introduced into the processing region of the chamber at a flowrate of about 300 sccm to about 1,000 sccm, such as about 600 sccm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com