About: http://webisa.webdatacommons.org/194744361

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, for SOI wafers, an insulating layer such as an oxide film provided between an SOI layer and a Si supporting substrate disturbs the movement of heavy-metal impurities, resulting in an insufficient gettering effect.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com