About: http://webisa.webdatacommons.org/198193343

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, there is a need for a low cost method and apparatus for providing uniform and diffuse illumination over a wide area for backlighting wafers during coarse alignment.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk