About: http://webisa.webdatacommons.org/19926691

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	One of the conventional SOI technology consists of depositing a polysilicon layer over an insulating layer such as thermally oxide film over the silicon substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es