About: http://webisa.webdatacommons.org/201238634

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The above object can be achieved, according to the present invention, by provision of a wafer transport method including the steps of:
http://www.w3.org/ns/prov#wasQuotedFrom	google.com