About: http://webisa.webdatacommons.org/201928483

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, barrier layer 12 may be formed by depositing an oxide layer, or other material, that provides a barrier between substrate 10 and a layer that overlies barrier layer 12, such as masking layer 14.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com