About: http://webisa.webdatacommons.org/208363023

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first dielectric layer 202 is made of material, such as silicon dioxide, while the metal plug 204 may include any conductive material, but it preferably includes a tungsten plug.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com