About: http://webisa.webdatacommons.org/214988420

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The MEMS device 3 is formed by a known method utilizing a sacrificing layer made of a material such as polyimide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com