PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • The insulating membrane is material such as polyimide or parylene and by photoresist and etching procedures a number of openings in the membrane are provided over an active area of a particular chip such that by subsequent masking and metal deposition steps, metallic lands are provided to form electrical paths between the openings over a chip and openings for a secondary structure contact grid.
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com