| http://www.w3.org/ns/prov#value | - The thin part 1 c is preferred to have a shape such as shown in FIG. 6, which is bent at the center toward the side opposite to the side having piezoelectric portions 2 and 3 formed thereon, because in such a shape, the linearity of flexural displacement to electric field is high; or a shape such as shown in FIG. 7, whose section in thickness direction has a W shape having three infection points.
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