About: http://webisa.webdatacommons.org/218909495

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The transfer and cleaning chamber 82 is provided with openings, such as a door to carry a wafer W in and out and a door for the maintenance of the polishing heads 38A, etc., and dressing devices 35A etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com