About: http://webisa.webdatacommons.org/219157839

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The mask 2104 comprises a film member made of a material such as polyimide, for example, on which a semiconductor pattern and an alignment mark 2104a are formed with a material such as gold, for example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com