About: http://webisa.webdatacommons.org/224724785

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, the stage including the rough moving mechanism can be made thinner, whereby the stability against temperature in the vertical direction (Z) can be enhanced.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com