About: http://webisa.webdatacommons.org/225534848

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first insulating interlayer 102 may be formed of an oxide, such as silicon oxide, using a CVD process.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com